毕设基本摘要
摘要
晶体管厂恒温车间空气调节工程属于光学微电子净化工程亦名无尘室或清净室，目前已是半导体、精密制造、液晶制造、光学制造、线路板制造和生物化学、医药、食品制造等行业不可或缺的重要设施。近几年来，由于技术创新发展，对于产品的高精密度化、细小型化之需求更为迫切，如超大型积体电路之研究制造，已成为世界各国在科技发展上极为重视的项目。
本文详细介绍了无锡某晶体管恒温恒湿无尘室车间的设计过程，车间内包括精磨间，精镗间，光曲磨间，电位差计校验修理室等。设计区按晶体管生产工艺需求设计ISO-7级洁净空调系统，净化空调系统严格遵守《电子工业洁净厂房设计规范》（GB 50472-2008）和《洁净厂房设计规范》（GB50073-2001）的相关规定采用初、中、高三级过滤全空气空调系统，气流组织形式采用上部侧送、中上部回风方式。
本设计本着规范、合理、节能的三个设计原则在首先保证所设计的空调系统能够达到晶体管厂恒温车间生产工艺对室内空气环境的要求，同时注重节能减排，灵活运用规范的相关规定，使整个系统达到布局合理、降低运行功耗、节约施工材料的目的。
关键词：无尘室，恒温恒湿，全空气系统，洁净空调系统
Abstract
Transistor factory constant temperature workshop air conditioning engineering belongs to optical microelectronics purification engineering also name or clean room, clean room is already the semiconductor, precision manufacturing, LCD manufacturing, optical manufacturing, circuit board manufacturing and biochemistry, medicine, food manufacturing and other industries indispensable important facilities.In recent years, due to technical innovation and development, for the product with high precision, fine miniaturization demand more urgent, such as the study of the super large integrated circuit manufacturing, has become the countries all over the world are of the utmost importance in the development of science and technology projects.
This paper introduces in detail the wuxi a transistor constant temperature and humidity of clean room workshop design process, the workshop including fine grinding, fine boring, optical curve grinding, potentiometer check repair room, etc.Design area according to the transistor production process requirements ISO - level 7 clean air conditioning system, purify the air conditioning system strictly abide by the "electronics industry clean workshop design specification" (GB 50472-2008) and "clean workshop design code" (GB50073-2001) with the relevant provisions of the early, middle and high level 3 to filter the air conditioning system, air distribution forms the upper side to send, the upper air return way.
This design in line with norms, reasonable, three design principles of energy saving in the design of the air conditioning system can achieve first transistor factory constant temperature workshop production process on the requirements of the indoor air environment, at the same time pay attention to energy conservation and emissions reduction, flexible use of related norms, to achieve the whole system layout is reasonable, reduce the power consumption of the operation, the purpose of saving construction material.
Keyword: Clean room, constant temperature and humidity, the entire air system, clean air conditioning system
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